Patent · US Expired

Thermal-wave measuring method

US6812468B1 · kind B1 · utility

6Cited by

10References

10Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Joachim Baumann · Dortmund, DE
Thomas Mangold · Hersbruck, DE

Key dates

Filing date	Feb 7, 2001
Grant date	Nov 2, 2004
Priority date	—
Expiry date	Feb 7, 2021

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/171
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The simultaneous multi-frequency excitation with two or more discrete frequencies of an electrically modulatable hot light source enables the parallel evaluation corresponding to the different drive frequencies. As a result thereof, the measuring time in the measurement of multi-layer systems is significantly shortened. As a result of a suitable selection of the discrete frequency parts of the drive frequencies, these can be adapted to the measurement problem.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.