MEMS device having a flexure with integral electrostatic actuator
US6812617B2 · kind B2 · utility
6Cited by
8References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 18, 2002 |
| Grant date | Nov 2, 2004 |
| Priority date | — |
| Expiry date | Aug 16, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/058
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-electro-mechanical device comprises a moveable mass, a frame for supporting the mass, and a flexure extending between the mass and the frame. The flexure includes an integral actuator for moving the mass member with respect to the frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.