Humidity sensor
US6812821B2 · kind B2 · utility
14Cited by
23References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2002 |
| Grant date | Nov 2, 2004 |
| Priority date | — |
| Expiry date | May 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A humidity sensor comprising an insulating substrate, a detection electrodes and a moisture-sensitive layer, wherein the moisture-sensitive layer is a porous layer and has a thickness not greater than 200 &mgr;m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.