Micro-electro-mechanical device having improved torsional members and a method of manufacturing therefor
US6813054B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 21, 2002 |
| Grant date | Nov 2, 2004 |
| Priority date | — |
| Expiry date | Apr 2, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention addresses a micro-electro-mechanical (MEMS) device, or an array of such devices, for use in an optical communication system and a method of manufacture therefore. An embodiment of the device includes a moveable element support structure, a moveable element and torsional members that couple the moveable element support structure and the moveable element and allow the moveable element to gimbal with respect to the support structure. The inventive device includes torsional members that are substantially free of corrosion thereby producing a device with improved response characteristics. The method includes using an etchant that substantially inhibits corrosion of the torsional members.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.