Fabrication of fabry-perot polymer film sensing interferometers
US6813401B1 · kind B1 · utility
3Cited by
1References
10Claims
0Family size
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Key dates
| Filing date | Jun 11, 2002 |
| Grant date | Nov 2, 2004 |
| Priority date | — |
| Expiry date | Nov 24, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of forming an interferometer film for an interferometer sensor comprises forming a parylene polymer layer (8) of substantially uniform thickness directly on an interferometer substrate (4;45), the layer forming the interferometer film. Since the interferometer film (8) formed directly onto the surface of the interferometer substrate, there is improved conformity between the two surfaces at the interface between the polymer layer and the substrate and improved uniformity in the thickness of the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.