Patent · US Expired

Rectroreflecting metrology target marker device

US6813840B1 · kind B1 · utility

7Cited by
14References
19Claims
0Family size

Assignees

Inventors

Key dates

Filing dateJun 28, 2000
Grant dateNov 9, 2004
Priority date
Expiry dateJun 28, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01C15/02
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The device comprises a target member (4) and a support (1) for supporting the target member. The support includes a receptacle head (12) for the target member, including a housing (15) open to the outside via an outwardly flared frustoconical seat (16). The target member includes a flange (42) having a spherical annular lateral surface adapted to bear tangentially against the seat (16), and a plate (45) upstanding perpendicularly on the flange in an equatorial plane an imaginary sphere (44) of which the lateral surface of the spherical annular flange is part. The plate has two parallel plane retroreflecting faces and a hole (46) passing completely through it and centered on an axis perpendicular to the faces of the plate and passing through the center of the spherical surface, and the hole is open at both ends via a bevel (461).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.