Patent · US Expired

Electronic device, method for producing electron source and image forming device, and apparatus for producing electronic device

US6815001B1 · kind B1 · utility

19Cited by
4References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 11, 2000
Grant dateNov 9, 2004
Priority date
Expiry dateDec 11, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2201/3165
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A method of manufacturing an electronic device including a step of giving a droplet 12 of a liquid containing a formation material of a member that constitutes the electronic device to a plurality of portions on a substrate 1 while said substrate 1 and a droplet ejecting portion 7 are moved relatively in an in-surface direction of said substrate 1, wherein the droplet 12 is given while a position on a droplet given surface to which the droplet is given is corrected in accordance with the distribution of distances between the ejecting portion 7 and the droplet 12 given surface on the substrate which occurs when the substrate 1 and the ejecting portion 7 are relatively moved. Thereby forming the member constituting the electronic device accurately at the plural portion on the substrate 1, and thus forming plural electronic device of same charactoristics.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.