Cantilever having step-up structure and method for manufacturing the same
US6815866B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 3, 2003 |
| Grant date | Nov 9, 2004 |
| Priority date | — |
| Expiry date | Jan 3, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/014
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A cantilever having a step-up structure and a method of manufacturing the same. The cantilever includes a substrate, an anchor formed on the substrate, and a moving plate connected to the anchor while maintaining a predetermined gap from the substrate. The anchor includes a first anchor of a predetermined shape and a second anchor perpendicular to an edge of the first anchor while being formed along a longitudinal axis of the moving plate. Accordingly, a deformation of the cantilever caused by the high temperature and pressure in a manufacturing process thereof is considerably reduced. As a result, the yield rate of the cantilever is improved, and the reliability of a product using the cantilever is also improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.