Inspection method and inspection device for active matrix substrate, inspection program used therefor, and information storage medium
US6815975B2 · kind B2 · utility
136Cited by
6References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 20, 2003 |
| Grant date | Nov 9, 2004 |
| Priority date | — |
| Expiry date | May 20, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B20/30
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An inspection method and device are provided. The inspection method includes charging a parasitic capacitor between the gate and the drain of an operating transistor by supplying a potential from an inspection device, measuring discharge current from the parasitic capacitor by using the inspection device by discharging the parasitic capacitor, and determining whether or not a defect exists in each of a plurality of pixels by using the inspection device based on a value of the discharge current.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.