Micro mirror unit and method of making the same
US6817725B2 · kind B2 · utility
16Cited by
9References
4Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 26, 2002 |
| Grant date | Nov 16, 2004 |
| Priority date | — |
| Expiry date | Feb 4, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.