System and process for CU-CMP wastewater treatment
US6818131B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2002 |
| Grant date | Nov 16, 2004 |
| Priority date | — |
| Expiry date | Jan 3, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F2305/04
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A system for the treatment of CMP wastewater, including wastewater from a copper CMP process. The wastewater treatment system includes a coagulant supply tank from which an FSC polymer coagulant is directed into a reaction tank that separately receives the untreated wastewater. The coagulant may be mixed with the untreated wastewater in selected ratios to provide a desired dosing quantity of the coagulant in the reaction tank. As the wastewater and the FSC polymer coagulant are mixed in the reaction tank, the coagulant flocs the slurry chemicals in the wastewater and removes the chemicals from solution in the wastewater as a precipitate before the wastewater is directed to a clarifier. The clarifier separates the flocked precipitate from the wastewater, and the flocked particles settle on the bottom of the clarifier to form a sludge. The sludge is re-distributed back into the clarifier to coagulate inert particles in the wastewater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.