Method of fabrication to sharpen corners of Y-branches in integrated optical components and other micro-devices
US6818559B2 · kind B2 · utility
1Cited by
22References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2001 |
| Grant date | Nov 16, 2004 |
| Priority date | — |
| Expiry date | Sep 2, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1213
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Substantially sharp corners for optical waveguides in integrated optical devices, photonic crystal devices, or for micro-devices, can be fabricated. Non-sharp corners such as rounded corners, are first formed using lithographic patterning and vertical etching. Next, isotropic etching is used to sharpen the rounded corners. A monitor can be used to determine if the rounded corners have been sufficiently sharpened by the isotropic etching.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.