Pulsed laser deposition of transparent conducting thin films on flexible substrates

US6818924B2 · kind B2 · utility

Assignee

• United States of America as represented by the Secretary of the Air Force · US

Inventors

• Heungsoo Kim · Fairfax, US
• James Horwitz · Fairfax, US
• Zakya H. Kafafi · Alexandria, US
• Alberto Pique · Crofton, US
• Gary P. Kushto · Crofton, US

Key dates

• Filing date: May 16, 2003
• Grant date: Nov 16, 2004
• Expiry date: May 16, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E10/50

Abstract

The invention relates to the deposition of transparent conducting thin films, such as transparent conducting oxides (TCO) such as tin doped indium oxide (ITO) and aluminum doped zinc oxide (AZO) on flexible substrates by pulsed laser deposition. The coated substrates are used to construct low cost, lightweight, flexible displays based on organic light emitting diodes (OLEDs).