Asymmetric fabry-perot modulator with a micromechanical phase compensating cavity
US6819466B2 · kind B2 · utility
10Cited by
8References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 26, 2001 |
| Grant date | Nov 16, 2004 |
| Priority date | — |
| Expiry date | Dec 26, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y20/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An asymmetric Fabry-Perot modulator is disclosed having an adjustable resonant cavity length. A preferred embodiment of the invention includes an asymmetric Fabry-Perot modulator having a first reflector adjustably mounted to another portion of the modulator containing a second reflector. The length of the resonant cavity is adjusted by microelectomechanically changing the distance from the first reflector to the second reflector. In turn, this change of the resonant cavity length may tune the modulator to an optimal wavelength corresponding to the electro-absorptance material in the modulator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.