Moisture passivated planar index-guided VCSEL
US6819697B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2003 |
| Grant date | Nov 16, 2004 |
| Priority date | — |
| Expiry date | Jan 13, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELS) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, the invention features a VCSEL that includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region that is disposed between the top mirror and the bottom mirror and includes an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator. The vertical stack structure defines an etched hole that extends from the substantially planar top surface to the oxidized peripheral region. The etched hole contains a polymer layer and is moisture passivated by an overlying moisture penetration barrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.