Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
US6821620B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2002 |
| Grant date | Nov 23, 2004 |
| Priority date | — |
| Expiry date | Dec 15, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2891
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cleaning sheet has a cleaning layer having a surface resistivity not less than 1×1013 &OHgr;/□. In a method of manufacturing a conveying member with a cleaning function, for sticking the cleaning sheet, in which the cleaning layer formed of an adhesive that is polymerized/cured by an active energy is provided onto one surface of a base material and an ordinary adhesive layer is provided onto the other surface thereof, onto the conveying member via an ordinary adhesive layer to have a shape larger than the shape of the conveying member and then cutting the cleaning sheet along a shape of the conveying member, wherein a polymerizing/curing reaction of the cleaning layer is carried out after the cleaning sheet is cut out into the shape of the conveying member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.