Kind of thin films for microsystem technology and microstructuring and their use

US6821692B1 · kind B1 · utility

Assignee

• CLONDIAG CHIP TECHNOLOGIES GMBH · DE

Inventors

• Eugen Ermantraut · Jena, DE
• Johann Michael Köhler · Golmsdorf, DE
• Torsten Schulz · Pinneberg, DE
• Klaus Wohlfart · Jena, DE
• Stefan Wolfl · Jena, DE

Key dates

• Filing date: Feb 4, 1999
• Grant date: Nov 23, 2004
• Expiry date: Feb 4, 2019

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02282
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The present invention relates to novel thin layers for microsystem techniques and microstructuring. It is an object of the invention to provide thin layers which can be manufactured under less problems and more economically than the previous conventional layers, and which permit the use of existing technologies for microstructuring. The object is realized in that the thin layer is formed of an enzymatically degradable biopolymer in a range of layer thicknesses of from 30 nm to 3 &mgr;m. Biopolymeric thin layers manufactured according to the invention permit their application, after a respective structurizing, as test assays or in setting up substance libraries.