Electrostatic spring softening in redundant degree of freedom resonators
US6823734B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 25, 2003 |
| Grant date | Nov 30, 2004 |
| Priority date | — |
| Expiry date | Apr 25, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/1275
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.