Acceleration sensor
US6823735B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 26, 2001 |
| Grant date | Nov 30, 2004 |
| Priority date | — |
| Expiry date | Dec 25, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0915
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an acceleration sensor including a vibrator subject to a sliding vibration and a weight section connected to the vibrator and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section, for detecting an angular moment about the support point, which is produced at the weight section by application of acceleration, as sliding vibration with the vibrator, the acceleration sensor includes a rectangular substrate having a plurality of electrodes electrically connected to the vibrator, a formation pattern of the plurality of electrodes is symmetrical about an axis parallel to at least one side of the substrate, and the plurality of electrodes have substantially equal thickness. Since the formation pattern of the electrodes on the substrate is symmetrical and the respective electrodes have substantially equal thickness, the vibrator that is bonded to this substrate does not incline and the detection sensitivity does not vary.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.