Turbomolecular pump
US6824357B2 · kind B2 · utility
5Cited by
15References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 27, 2002 |
| Grant date | Nov 30, 2004 |
| Priority date | — |
| Expiry date | Sep 15, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2260/607
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbomolecular pump including a housing having a suction opening and a gas outlet opening, and a plurality of alternatingly arranged one behind another, stator and stator rings provided, respectively with support rings for supporting each a blade, with a support ring of a stator disc located adjacent to a high pressure region of the turbomolecular pump being connected with an adjacent housing part over a large surface or being formed with the adjacent housing part as one-piece part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.