Soft magnetic film of FeCoMO having a high saturation flux density, a moderate soft magnetism and a uniaxial magnetic anisotropy
US6828046B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2001 |
| Grant date | Dec 7, 2004 |
| Priority date | — |
| Expiry date | Sep 28, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12951
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A soft magnetic film comprising Fe, Co, a metallic element (M), and oxygen (O) is provided. The soft magnetic film is represented by a composition formula of (Fe1-aCoa)xMyOz. The metallic element (M) is one selected from a group consisting of Al, B, Ga, Si, Ge, Y, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Rh, Ru, Ni, Pd and Pt, or is an alloy composed of at least two selected from this group. The composition formula fulfills the following conditions: a=0.05-0.65; y=0.2-9 at %, z=1-12 at %, and y+z=<15 at %; and x=(100−y−z) at %. A crystal structure is formed by having a bcc phase as a principal phase. The bcc phase has a crystal grain not exceeding 50 nm in diameter. The bcc phase includes a solid solution of the metallic element (M) and the oxygen (O).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.