Pressure measurement device including a capacitive sensor in an amplifier feedback path
US6828802B2 · kind B2 · utility
3Cited by
18References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 16, 2002 |
| Grant date | Dec 7, 2004 |
| Priority date | — |
| Expiry date | Aug 19, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure measurement device that has a digital clock circuit that provides an excitation clock and a control output. An integrator includes a switch controlled by the control output, an amplifier, and a pressure sensing capacitance coupled in an amplifier feedback path. The switch connects across the first pressure sensing capacitance. A reference capacitance that is insensitive to the pressure couples between the excitation clock and the amplifier input. An amplifier output represents the pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.