MEMS digital-to-acoustic transducer with error cancellation
US6829131B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 1999 |
| Grant date | Dec 7, 2004 |
| Priority date | — |
| Expiry date | Sep 13, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R17/00
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.