Patent · US Expired

Catalyst patterning for nanowire devices

US6831017B1 · kind B1 · utility

114Cited by
7References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 5, 2002
Grant dateDec 14, 2004
Priority date—
Expiry dateJan 23, 2023

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/887
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Nanowire devices may be provided that are based on carbon nanotubes or single-crystal semiconductor nanowires. The nanowire devices may be formed on a substrate. Catalyst sites may be formed on the substrate. The catalyst sites may be formed using lithography, thin metal layers that form individual catalyst sites when heated, collapsible porous catalyst-filled microscopic spheres, microscopic spheres that serve as masks for catalyst deposition, electrochemical deposition techniques, and catalyst inks. Nanowires may be grown from the catalyst sites.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.