Patent · US Expired

Time base comprising an integrated micromechanical tuning fork resonator

US6831531B1 · kind B1 · utility

52Cited by

5References

18Claims

0Family size

Assignee

ETA SA MANUFACTURE HORLOGÈRE SUISSE · CH

Inventors

Metin Giousouf · Eßlingen, DE
Heinz Kück · Stuttgart, DE
Rainer Platz · Neuchâtel, CH

Key dates

Filing date	Jun 20, 2003
Grant date	Dec 14, 2004
Priority date	—
Expiry date	Jul 17, 2023

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/02299
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.