Method of manufacturing nonlinear element, method of manufacturing electrooptic device, electrooptic device, and electronic apparatus
US6831728B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2002 |
| Grant date | Dec 14, 2004 |
| Priority date | — |
| Expiry date | May 18, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a method of manufacturing a nonlinear element capable further improving nonlinearity of a nonlinear element, an electrooptic device, and electronic apparatus. In forming an element substrate of a liquid crystal device, an underlying layer is formed on the surface of the element substrate in the underlying layer forming step (a), and then a first metal film having a metal film containing at least Ta is formed in the first metal film forming step (b). Then, in the insulating film forming step (c), the first metal film is annealed under high pressure in an atmosphere containing water vapor to form an insulating film on the first metal film. Then, in the second metal film forming step, a second metal film is formed on the surface of the insulating film to produce a nonlinear element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.