Molecular pump for forming a vacuum
US6832888B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2002 |
| Grant date | Dec 21, 2004 |
| Priority date | — |
| Expiry date | Nov 26, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/642
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A molecular pump for exhausting a chamber has a casing, a stator mounted in the casing, and a rotor mounted in the casing for undergoing rotation relative to the stator during exhaustion of the container. The rotor has a surface disposed opposite to and confronting a surface of the stator. A thread groove is formed in at least one of the opposite and confronting surfaces of the stator and the rotor. A clearance varying device varies a magnitude of a clearance between the opposite and confronting surfaces of the stator and the rotor. An exhaust controlling device controls a degree of exhaustion of the chamber by adjusting the magnitude of the clearance between the opposite and confronting surfaces of the stator and the rotor to a preselected target value during operation of the molecular pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.