Method and apparatus for trimming a pellicle film using a laser
US6833222B1 · kind B1 · utility
8Cited by
5References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2002 |
| Grant date | Dec 21, 2004 |
| Priority date | — |
| Expiry date | Dec 26, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/108
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for trimming a pellicle film using a laser are disclosed. A laser trimming assembly includes a modified laser-cutting head coupled to a laser. The laser includes a laser beam for trimming a pellicle film that extends beyond a perimeter of a pellicle frame. The modified laser-cutting head includes a nozzle and at least one hose port located on the nozzle. The hose port may receive a vacuum hose for removing particulate matter created during a trimming process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.