Apparatus for evaluating electrical characteristics
US6833719B2 · kind B2 · utility
12Cited by
4References
7Claims
0Family size
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Key dates
| Filing date | Jun 19, 2002 |
| Grant date | Dec 21, 2004 |
| Priority date | — |
| Expiry date | Jun 19, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus provided for evaluating electrical characteristics by bringing a plurality of metal probes in contact with a sample. A metal probe is formed on a free end of a cantilever on which are formed a resistor, two electrodes for resistance detection, and an electrode for measuring electrical characteristics. A tip of the metal probe projects beyond the free end of the cantilever. The probe position is controlled by an atomic force microscopy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.