Method and apparatus for APC solver engine and heuristic
US6834212B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2002 |
| Grant date | Dec 21, 2004 |
| Priority date | — |
| Expiry date | Jul 13, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B13/042
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Systems and methodologies are provided that adapt and control desired fabrication processes by utilizing a control model based solution. A suitable control model is obtained or derived from one or more other control models. A formulaic description is then obtained that predicts one or more desired outputs based on various process settings and inputs. A suitable solution to the description that achieves the desired outputs and is relatively close to ideal processing conditions is obtained utilizing a heuristic. The solution includes process control parameters or settings that are employed to control and/or modify a fabrication process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.