Method of producing sensor element
US6834419B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2003 |
| Grant date | Dec 28, 2004 |
| Priority date | — |
| Expiry date | Nov 7, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49798
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an electromechanical drive or a sensor element composed of piezoelectric elements arranged in the form of a stack. The drive or the sensor element is intended for measurement instruments and operates even at very high temperatures.The new drive or the new sensor element (10) for this purpose comprises a number of piezoelectric ceramic layers (12a-f), with electrode layers (16a-e) in each case being arranged between two mutually facing surfaces of directly adjacent piezoelectric ceramic layers. Connectors (18a,b) in the form of wires run in grooves (14a-d) in the electrode layers (16a-e) in order to make electrical contact with the electrode layers (16a-e), and are passed out of the electrode layers (16a-e).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.