Patent · US Expired

Optical microcantilever

US6834537B1 · kind B1 · utility

8Cited by
1References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 27, 2001
Grant dateDec 28, 2004
Priority date
Expiry dateSep 27, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q60/22
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An optical microcantilever has an optical waveguide for propagating light. The optical waveguide has a first side, a second side opposite to the first side, and a tip portion formed on the first side and at a free end of the optical waveguide. The tip portion has a microscopic aperture. A light blocking film is disposed on the first side of the optical waveguide. A reflecting film is disposed on the second side of the optical waveguide. A reflecting member forms part of the reflecting film and is disposed at the free end of the optical waveguide. The reflecting member has a generally planar surface for reflecting light propagated by the optical waveguide and for guiding the reflected light towards the microscopic aperture to generate near-field light at the microscopic aperture.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.