Optical microcantilever
US6834537B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2001 |
| Grant date | Dec 28, 2004 |
| Priority date | — |
| Expiry date | Sep 27, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical microcantilever has an optical waveguide for propagating light. The optical waveguide has a first side, a second side opposite to the first side, and a tip portion formed on the first side and at a free end of the optical waveguide. The tip portion has a microscopic aperture. A light blocking film is disposed on the first side of the optical waveguide. A reflecting film is disposed on the second side of the optical waveguide. A reflecting member forms part of the reflecting film and is disposed at the free end of the optical waveguide. The reflecting member has a generally planar surface for reflecting light propagated by the optical waveguide and for guiding the reflected light towards the microscopic aperture to generate near-field light at the microscopic aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.