System and method for controlling thin film defects
US6835290B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2003 |
| Grant date | Dec 28, 2004 |
| Priority date | — |
| Expiry date | Feb 13, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system and method for reducing and controlling the number of defects due to carbon inclusions on magnetic media is disclosed. A diamond like carbon protective layer is deposited on magnetic media using a rotary cathode target assembly. The target and cathode are cylindrical in shape and are mounted on holder that allows the target and cathode to rotate while holding a magnet fixed. The target surface is periodically swept in through a plasma which sputters off the surface of the target. This prevents the build up of redeposited material on the target and consequently keeps the target surface cleaner. The reduction of redeposited material on the target surface reduces the number of unwanted particulates which are ejected from the surface, manifesting themselves as disk defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.