Apparatus for fabricating coating and method of fabricating the coating
US6835523B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 1999 |
| Grant date | Dec 28, 2004 |
| Priority date | — |
| Expiry date | Sep 15, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/146
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In an apparatus for fabricating a carbon coating, an object such as a magnetic r cording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.