Electrostatically actuated valve
US6837476B2 · kind B2 · utility
53Cited by
74References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2002 |
| Grant date | Jan 4, 2005 |
| Priority date | — |
| Expiry date | Sep 19, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87788
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.