Electrostatic control of micro-optical components
US6838738B1 · kind B1 · utility
29Cited by
6References
50Claims
0Family size
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Key dates
| Filing date | Feb 20, 2002 |
| Grant date | Jan 4, 2005 |
| Priority date | — |
| Expiry date | Feb 20, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrostatic actuator with inter-digital rotor and stator fingers formed in a the insulating and conductive layers of a wafer. The actuator is used to drive MicroElectroMechanical (MEMS) components, specifically micro-optical components such as mirrors, attenuators, switches, and tunable filters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.