Absolute humidity sensor
US6840103B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2000 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Feb 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An absolute humidity sensor for a microwave oven is disclosed. The absolute humidity sensor includes a substrate having a first hole and a second hole in a predetermined region, a membrane formed on the substrate, a humidity sensing element formed on the membrane where the first hole is formed, for detecting humidity exposed to the air, having a variable resistance value depending on the detected humidity, and a temperature compensating element formed on the membrane where the second hole is formed, for compensating for the resistance value of the humidity sensing element. For package, the absolute humidity sensor further includes a stem joined with a lower portion of the substrate, having pins for electrically connecting with the outside, and a hole to pass through external humidity, a wire for electrically connecting the electrode pads of the humidity sensing element and the temperature compensating element with the pins of the stem, and a metal shield case formed on an upper portion of the stem to cover an entire surface of the stem including the humidity sensing element and the temperature compensating element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.