Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge
US6840886B2 · kind B2 · utility
5Cited by
5References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 29, 2002 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Dec 31, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N2/126
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A friction drive including a drive shaft that is in rotational motion and in frictional contact with a follower at a contact area. The drive shaft transfers a thrust at the contact area. The follower receives the thrust and provides motion in response to the thrust. A flexure hinge couples the drive shaft to the follower with a constant force while restraining movement of the contact area in the direction of the thrust.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.