Fluorochemical treatment for silicon articles
US6841079B2 · kind B2 · utility
18Cited by
36References
53Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2002 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Nov 10, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y30/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Silicon substrates having Si—H bonds are chemically modified using a fluorinated olefin having the formula:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.