Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions
US6841333B2 · kind B2 · utility
17Cited by
36References
49Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2002 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Mar 5, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/122
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Photoacid generator salts comprising photoactive cationic moieties and segmented, highly fluorinated-hydrocarbon anionic moieties are disclosed which provide high photoacid strength and can be tailored for solubility and polarity. The present invention further relates to photoacid generators as they are used in photoinitiated acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.