Transmission electron microscope sample preparation
US6841788B1 · kind B1 · utility
32Cited by
8References
17Claims
0Family size
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Inventors
Key dates
| Filing date | Aug 3, 2001 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Aug 3, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3174
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sample preparation apparatus and method includes a wafer stage platform with an optical microscope and integrated pattern recognition to automatically address specific locations on the wafer sample of interest. A laser attaches to the optical microscope to mill a set pattern around the area of interest. A precision micro-manipulator engages the sample support structure, extracts the structure, and places the structure in a TEM holder or holder tip. The holder or holder tip can then be placed inside a FIB for final thinning, followed by direct transfer into the TEM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.