System and process for detecting leaks in sealed articles
US6843107B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Aug 15, 2003 |
| Grant date | Jan 18, 2005 |
| Priority date | — |
| Expiry date | Aug 15, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H1/0443
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for leak testing a plurality of hermetic electronic packages of the type that have an internal chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a manner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic packages within a test area, and then stimulating the hermetic electronic packages with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic packages is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is deter…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.