2D/3D chemical sensors and methods of fabricating and operating the same
US6843899B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 6, 2001 |
| Grant date | Jan 18, 2005 |
| Priority date | — |
| Expiry date | Apr 12, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/403
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Chemical sensors include a flexible substrate, a flexible lower electrode on the flexible substrate, and a patterned flexible dielectric layer on the flexible lower electrode opposite the flexible substrate. A patterned flexible upper electrode also is included on the patterned flexible dielectric layer opposite the flexible lower electrode. The patterned flexible dielectric layer and the patterned flexible upper electrode are patterned to establish a first current flow path between the flexible lower electrode and the patterned flexible upper electrode through the chemical, if present, upon application of voltage between the flexible lower electrode and the patterned flexible upper electrode. The flexible lower electrode also may be patterned to establish a second current flow path between portions of the patterned flexible lower electrode through the chemical, if present, upon application of voltage between the portions of the patterned flexible lower electrodes. The flexible upper electrode also may be patterned to establish a third current flow path between portions of the patterned flexible upper electrode through the chemical, if present, upon application of voltage between t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.