Patent · US Expired

Method of manufacturing color filter

US6844121B2 · kind B2 · utility

1Cited by
3References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 27, 2002
Grant dateJan 18, 2005
Priority date
Expiry dateJan 29, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/0007
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method of manufacturing color filter comprising the steps of forming a metal layer and a photoresistor layer on a substrate; defining a dent over the photoresistor layer and removing the metal layer below the dent; depositing an optical filter material over the resulting structure at relative high temperature, lift off the photoresistor layer by etching the metal layer. The optical filter material can be fabricated at higher temperature (300-400° C.) than conventional cold process, the extinction ratio of the filter made by the optical filter material can be as high as 90% to enhance the performance of the projector system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.