Test handler
US6844717B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2001 |
| Grant date | Jan 18, 2005 |
| Priority date | — |
| Expiry date | Mar 13, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention discloses a test handler comprising a main body, a stocker including a user tray supplier and a user tray deliverer for loading plurality of user trays carrying the semiconductor device during devices tests, a plurality of test trays, a device loading means for transferring the devices in the user tray of the user tray supplier to the test tray, a first tray inverter changing the horizontal posture of the test tray, a soak chamber preparing a desired test temperature condition, a test chamber accomplishing tests, a de-soak chamber restoring the devices temperature, a second tray inverter inverting to the test tray of a horizontal posture, a device unloading means transferring the semiconductor devices on the test tray. The present invention can double the lot size in unit operation to improve equipment operation ratio. In more, the device loading time and unloading can be reduced so that the number of the devices treated in unit operation can be increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.