Electro-optical device, electronic apparatus, and method for manufacturing electro-optical device
US6844955B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 3, 2002 |
| Grant date | Jan 18, 2005 |
| Priority date | — |
| Expiry date | Sep 11, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133553
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides an electro-optical device, an electronic apparatus using the electro-optical device, and a method for manufacturing an electro-optical device. High-quality image display may be realized by avoiding abnormal exposures during formation of a photosensitive resin layer on a transparent substrate by using photolithography. A TFT-arrayed substrate of a reflective or transflective electro-optical device is manufactured in such a manner that a photosensitive resin is exposed from the front face side of the TFT-arrayed substrate after the photosensitive resin is applied, while the TFT-arrayed substrate is held at the rear face side thereof by a vacuum chuck. In this case, since a light-shielding film is formed at the lower side of a photosensitive resin layer, a risk in that light transmitted through the TFT-arrayed substrate is reflected by the vacuum chuck and thereby transfers marks and the like of suction holes to the photosensitive resin can be reduced or avoided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.