Heterodyne feedback system for scanning force microscopy and the like
US6845655B2 · kind B2 · utility
12Cited by
12References
24Claims
0Family size
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Key dates
| Filing date | Mar 17, 2003 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Mar 17, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/85
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Frequency translation of microelectromechanical vibration signals such as a tip vibration signal in a scanning force microscopy system expands the versatility of existing control systems and enables new signal processing techniques. The vibration signal such as the cantilever probe tip vibration signal of a scanning force microscopy is frequency converted to a lower or higher frequency signal that is utilized to provide a control signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.