Hydrophobic and hydrophilic membranes to vent trapped gases in a plating cell
US6846392B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | May 31, 2000 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Aug 4, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D21/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A plating tool cell anode for venting unwanted gases from a fluid plating solution. In a first embodiment, the solution is introduced into a chamber, defined by the plating tool cell (10), by fluid inlet (12) and contacts the anode (50). The fluid encounters a hydrophobic membrane (14) and a hydrophilic membrane (15) spaced from the hydrophobic membrane. A driving force, such as a vacuum, is applied to the gap (16) between the membranes to remove unwanted gases therein. In a second embodiment, a single membrane is used that is both hydrophobic and hydrophilic. Preferably, the hydrophobic portion of the membrane is located at or near the perimeter of the chamber and gas to be vented is directed toward the hydrophobic portion(s).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.