Coating device and method
US6846517B2 · kind B2 · utility
3Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2002 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Apr 10, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/044
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for coating a film with more than two thicknesses in different sections of the film. A substrate is set on a turntable that spins regularly. A mask is set close to the substrate and a film is coated on the substrate by a coating source. The shape of the mask depends on the thickness of the film. The coating source is set opposite the turntable and the mask is set between the coating source and the turntable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.