Process for production of pattern-forming body
US6846616B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2001 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Feb 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/09
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A process for the production of a pattern-forming body, the process including the steps of disposing a catalyst-containing layer-side substrate containing at least a photo catalyst-containing layer and a pattern-forming body substrate containing a characteristic-changeable layer which is changed in characteristics by the action of the photocatalyst in at least said photocatalyst-containing layer such that the photocatalyst-containing layer is in contact with the characteristic-changeable layer followed by performing exposure to thereby change the characteristics of the exposed portion of the characteristic-changeable layer and thereafter dismounting the photocatalyst-containing layer-side substrate, thereby obtaining a pattern-forming body having a pattern which has been changed in characteristics on the characteristic-changeable layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.